Sotabase

Career

· Researcher, MIT Robot Locomotion Group

Publications (65)

Dual emission laser induced fluorescence for direct planar scalar behavior measurements
1998
316
cited
The effect of small particles on fluid turbulence in a flat‐plate, turbulent boundary layer in air
1991
120
cited
The behavior of solid particles in a vertical turbulent boundary layer in air
1990
56
cited
Measurements of Slurry Film Thickness and Wafer Drag during CMP
2004
52
cited
Mixing enhancement by and noise characteristics of streamwise vortices in air jet
1994
50
cited
Investigating Slurry Transport Beneath a Wafer during Chemical Mechanical Polishing Processes
2000
47
cited
Use of streamwise vorticity to increase mass entrainment in a cylindrical ejector
1995
43
cited
Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications
2003
40
cited
On Controlling the Kinematics of a Filament Stretching Rheometer Using a Real-Time Active Control Mechanism
1999
29
cited
In-Situ Investigation of Slurry Flow Fields during CMP
2009
22
cited
Entrainment and acoustic variations in a round jet from introduced streamwise vorticity
1994
19
cited
The Effect of Wafer Shape on Slurry Film Thickness and Friction Coefficients in Chemical Mechanical Planarization
2000
19
cited
Effects of Disk Design and Kinematics of Conditioners on Process Hydrodynamics during Copper CMP
2006
18
cited
In Situ Measurement of Pressure and Friction during CMP of Contoured Wafers
2005
17
cited
Characterizing Slurry Flow During CMP Using Laser Induced Fluorescence
1997
14
cited
Mixing measurements using laser induced fluorescence
1995
11
cited
TRIBOLOGY, FLUID DYNAMICS AND REMOVAL RATE CHARACTERIZATION OF NOVEL SLURRIES FOR ILD POLISH APPLICATIONS
2001
11
cited
PARAMETRIC STUDY OF JET MIXING ENHANCEMENT BY VORTEX GENERATORS , TABS , AND DEFLECTOR PLATES
1997
10
cited
Turbulence characteristics along the path of a heavy particle
2001
10
cited
A quantitative mixing analysis using fluorescent dyes
1996
9
cited
Sotabase
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